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M. Maheswaran and HarNarayan Upadhyay, 2012. A Study on Performance-driven Microfabrication Methods for MEMS Comb-drive Actuators. Journal of Applied Sciences, 12: 920-928.
DOI: 10.3923/jas.2012.920.928
URL: https://scialert.net/abstract/?doi=jas.2012.920.928
DOI: 10.3923/jas.2012.920.928
URL: https://scialert.net/abstract/?doi=jas.2012.920.928