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Journal of Applied Sciences
  Year: 2012 | Volume: 12 | Issue: 10 | Page No.: 920-928
DOI: 10.3923/jas.2012.920.928
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A Study on Performance-driven Microfabrication Methods for MEMS Comb-drive Actuators

M. Maheswaran and HarNarayan Upadhyay

Micro-electromechanical Systems (MEMS) comb-drive actuators are used to drive many micro-optical components such as switching mirror, scanning mirror applications. These actuators are electrostatically operated to obtain a tilting or rotational actuation. They have proven their capabilities for accomplishing extended travel ranges-of-movement reliably within the stable range. These actuators are fabricated by using different state of art fabrication techniques and methods with different materials. The residual stress developed during the deposition process, influences the electromechanical behavior of the fabricated actuator. Performance-driven criteria such as analog/binary mode, unidirectional/bidirectional and expected range of actuation for the comb-drives are realized in fabrication to achieve the expected specific requirements. In this study a study has been made on the critical steps in various microfabrication sequences by adopting a fabrication scheme of the actuator which precludes the generation of residual stress. The residual stress and stiction are the important parameters they are the limiting factors; but they are used in positive way to achieve specific structural behavior of the actuators. The causes and effects of residual stress formation during the microfabrication process are studied from the literatures. This knowledge can be used to correlate the performance of MEMS actuators with the microfabrication critical parameters.
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How to cite this article:

M. Maheswaran and HarNarayan Upadhyay, 2012. A Study on Performance-driven Microfabrication Methods for MEMS Comb-drive Actuators. Journal of Applied Sciences, 12: 920-928.

DOI: 10.3923/jas.2012.920.928






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