Jungang Yang
Institute of Computer Integrated Manufacturing, Shanghai Jiao Tong University, Shanghai, 200240, People�s Republic of China
Jie Zhang
Institute of Computer Integrated Manufacturing, Shanghai Jiao Tong University, Shanghai,
200240, People�s Republic of China
Yihua Ma
Shanghai Baosight Software Co., Ltd, Shanghai, 201203, People�s Republic of China
Zhiyu Wang
Shanghai Baosight Software Co., Ltd, Shanghai, 201203, People�s Republic of China
ABSTRACT
The objective of this research was to investigate the process features of etchers and automatically provide mass multi-characteristics data for fault detection test. Before applying a fault detection system in a modern semiconductor wafer fabrication system, a great number of experiments and tests must be carried out to ensure the effectiveness and efficiency of the system. However, it is difficult to collect and storage different types of data with different characteristics for testing. This study proposed a Markov Property considered data generation approach based on analysis of the process state changes in etchers. The markov property of etchers state changes was demonstrated and a data generation model was built. Comparing with the existed historical data based data generation method and random data generation method, the proposed method considered not only statistical information from historical data but also the impact of the etchers' state changes. Experiments and industrial examples were used to measure the performance of the proposed method and results show that it has advantages such as simple expression, rapid and automatic data generation and easy reconfiguration, therefore is especially useful for the Fault Detection system test and simulation.
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Received: August 31, 2013;
Accepted: November 06, 2013;
Published: November 12, 2013
How to cite this article
Jungang Yang, Jie Zhang, Yihua Ma and Zhiyu Wang, 2013. A Markov Property Considered Data Generation Approach for Etchers Fault Detection Test. Journal of Applied Sciences, 13: 4695-4701.
DOI: 10.3923/jas.2013.4695.4701
URL: https://scialert.net/abstract/?doi=jas.2013.4695.4701
DOI: 10.3923/jas.2013.4695.4701
URL: https://scialert.net/abstract/?doi=jas.2013.4695.4701
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