Research Article
Carbonization Layer Obtained by Acetylene Reaction with Silicon (100) and (111) Surface Using Low Pressure Chemical Vapor Deposition
Faculty of Electrical Engineering, Universiti Teknologi Malaysia, 81310 Skudai, Johor, Malaysia
K. Yasui
Department of Electrical Engineering, Nagaoka University of Technology, 1603-1 Kamitomioka, Nagaoka 940-2188, Japan