Journal of Applied Sciences1812-56541812-5662Asian Network for Scientific Information10.3923/jas.2014.325.332XiaZhang 42014144The temperature characteristics of main physical parameters
of a fence structure capacitive micromachined accelerometer are investigated
by theoretical analysis and experiment. The experimental results show that the
two initial sensing capacitances change with temperature and their variations
are different from each other. Based on the temperature characteristics of the
accelerometer and its interface circuit, the system-level simulation model is
built on Simulink platform. The simulation results demonstrate that the mismatch
between the different variations of the two initial sensing capacitances as
temperature changing is the major influencing factor to the temperature performance
of the accelerometer system. The greater the mismatch degree is, the more serious
the temperature effect on the system becomes. The temperature performance of
the accelerometer system is improved from -6.245 to -2.1 mg °C-1
by adopting thermal resistance as the gain resistance of the instrumentation
amplifier, without any additional hardware circuit or software algorithm.]]>Bao, M.H.,2000pp: 123-137pp: 123-137Bird, G.A.,19832632223223Chae, J., H. Kulah and K. Najafi,200514235242Chen, Y.,20042004Chan, C.K., S.C. Lo, Y.C. Huang, M. Wu, M.Y. Wang and W. Fang,20121233013308Je, C.H., S. Lee, M.L. Lee, J. Lee, W.S. Yang and C.A. Choi,20102010pp: 635638Lakdawala, H. and G.K. Fedder,20042004Myers, D.R., R.G. Azevedo, L. Chen, M. Mehregany and A.P. Pisano,20122113211328Perlmutter, M. and L. Robin,20122012pp: 225229Painter, C.C. and A.M. Shkel,20012001pp: 43344342Painter, C.C. and A.M. Shkel,200313229237Sun, H., D. Fang, K. Jia, F. Maarouf, H. Qu and H. Xie,201111925933Tan, S.S., C.Y. Liu, L.K. Yeh, Y.H. Chiu, M.S. Lu and K.Y. Hsu,20115826612672Tan, S.S., C.Y. Liu, L.K. Yeh, Y.H. Chiu and K.Y. Hsu,20112011Veijola, T. and M. Turowski,200110263273Weng, H.N., X.M. Hu, Z. Pei, X. Cheng and J.L. Yang,200917479482Yu, X.T., L. Zhang, L.R. Guo, F. Zhou and H. Yu,2011199598Yen, T.H., M.H. Tsai, C.I. Chang, Y.C. Liu and S.S. Li et al.,20112011pp: 145148Zhang, L. and J. Chang,20112415511555Zheng, X.D., Z.H. Jin, Y.L. Wang, W.J. Lin and X.Q. Zhou,20091014131420Zheng, X.D.,20092009Zhang, X., H. Wang, X.D. Zheng, S.C. Hu and Z.H. Jin,20101110091015