Journal of Applied Sciences1812-56541812-5662Asian Network for Scientific Information10.3923/jas.2009.1658.1667MiskamM.A.SidekO.RuhaifiA.Z.9200999This study, present the analysis of the capacitive in-plane
linear comb drive microelectromechanical system (MEMS) accelerometer using
system-level simulation techniques, finite element method (FEM) and simple
analytical modeling. The silicon on insulator high aspect ratio micromachining
(SOI-HARM) process is use to fabricate the device. The behavior of the
device will be simulated using DC operating point analysis, mechanical
resonance frequency analysis, vary analysis, DC transfer analysis and
transient analysis. The results agree well with the results obtained by
Architect, FEM and analytical analysis. The design methodology and circuit
implementation of bandgap reference for MEMS accelerometer also will be
described. A low variation in voltage reference is proposed and simulated
using Silterra 0.13 μm CMOS technology. The voltage reference is
operated with a supply voltage of 2.5 V to achieve an output reference
of 1.17949 V. The circuit has achieved a very small variation in reference
voltage of about ± 0.36 mV resulting from temperature changes between
-50 to 100 °C and maximum PSSR of -49.03 dB.]]>Bernhard, E.B. and R.T. Howe,1996Chih-Ming, S., W. Chuanwei and F. Weileun,2008Haronian, D.,2000Islam, M.F., M.A.M. Ali and B.Y. Majlis,2008Gang, Z., X. Huikai, E.R. Lauren and K.F. Gary,1999John, K.C., H.J.F. Colin, M.W. Stewart and R.M. Alan,2008Josselin, V., P. Touboul and R. Kielbasa,1999Chae, J., H. Kulah and K. Najafi,2005Ka Nang, L., P.K.T. Mok and L. Chi Yat,2003Krishnamoorthy, U., R.H. Olsson, G.R. Bogart, M.S. Baker, D.W. Carr, T.P. Swiler and P.J. Clews,2008Rasoul, D. and S.M. Atarodi,2003Razavi, B.,2000Rincon, M. and G. Alfonso,2001Seiji, A., K. Sho, Y. Daiichiro and I. Yuichi,2007Tan, C.W. and S. Park,2002Vivek, A., T.K. Bhattacharayya and S. Banik,2006Xingguo, X., W. Yu-Liang and J. Wen-Ben,2005Zimmermann, L., J.P. Ebersohl, F.L. Hung, J.P. Berry and F. Baillieu et al.,1995