Journal of Applied Sciences1812-56541812-5662Asian Network for Scientific Information10.3923/jas.2009.1285.1292BabazadehF.KeshmiriS.H.7200997In this study, design and simulation of an IC-compatible
microelectromechanical resonator for use in VHF range of a wireless communication
system as a base element in integrated micromechanical resonator based
oscillators and front-end filters is reported. This resonator can be implemented
using thick polysilicon technology. The resonator with new design and
structure reduces vibrating micromechanical series motional resistance
R_{x} by increasing electrode-to-resonator overlap area through
use of scale up of the motionless dimension of the device; while maintaining
the resonant frequency. Quarter-wavelength supporting and attaching to
nodal points of the resonator is required to maximize quality factor of
the device. Resonant frequencies around 71 MHz, quality factor of 9912
and motional resistances R_{x} on the order of 480 Ω were
obtained by this design.]]>Abdelmoneum, M.A., M.U. Demirci and C.T.C. Nguyen,2003Abdolvand, R., H. Johari, G.K. Ho, A. Erbil and F. Ayazi,2006Alastalo, A.T. and V. Kaajakari,2006Bannon III, F.D., J.R. Clark and C.T.C. Nguyen,2000Blom, F.R., S. Bouwstra, M. Elwenspoek and J.H.J. Fluitman,1992Braginsky, V.P., V.P. Mitrofanov and V.I. Panov,1985Cheng, Y.T., W.T. Hsu, L. Lin, C.T.C. Nguyen and K. Najafi,2002Cho, Y.H., B.M. Kwak, A.P. Pisano and R.T. Howe,1993Cross, M.C. and R. Lifshitz,2001De Los Santos, H.J.,2002Demirci, M.U., M.A. Abdelmoneum and C.T.C. Nguyen,2003Hao, Z. and F. Ayazi,2005Hao, Z., A. Erbil and F. Ayazi,2003Lifshitz, R. and M.L. Roukes,2000Mihailovich, R.E. and N.C. MacDonald,1995Nathanson, H.C., W.E. Newell, R.A. Wickstrom and J.R., Jr. Davis,1967Navid, R., J.R. Clark, M. Demirci and C.T.C. Nguyen,2001Nguyen, C.T.C.,1999Nguyen, C.T.C.,1998Rebeiz, G.M.,2003Timoshenko, S., D.H. Young and W. Weaver,1974Varadan, V.K. and K.J. Vinoy,2002Wang, K., A.C. Wong and C.T.C. Nguyen,2000Yasumura, K.Y., T.D. Stowe, E.M. Chow, T. Pfafman and T.W. Kenny et al.,2000