Journal of Artificial Intelligence1994-54502077-2173Asian Network for Scientific Information10.3923/jai.2014.69.81KrushnasamyV.S. JulietA. Vimala 2201472Optimizing the design of devices that belongs to Micro Electro Mechanical System
(MEMS) technology is turning out to be a main area of research currently. Several
algorithms are available to produce an optimized design of MEMS. The MEMS accelerometer
may be scheduled using parameters that include Beam length, Beam width, Beam
depth, Beam mass, proof mass and so on. This study is chiefly involved in the
optimization of design parameters like die area and a novel parameter called
as Force. Artificial Bee Colony (ABC) optimization and Particle Swarm Optimization
(PSO) are the two algorithms that are used to optimize these parameters. The
ABC performs the primary optimization and PSO does the optimization of the fitness
solution resulting from the execution of ABC algorithm. Employing the two optimization
algorithms in a combined way yields improved optimized parameters, which are
engaged in the efficient design of MEMS accelerometer.]]>Allen, M.S., J.E. Massad, R.V. Field and C.W. Dyck,20082008Sabouhi, H.R. and M. Baghelani,201221048010488Krushnasamy, V.S. and A.V. Juliet,201460274283Benmessaoud, M. and M.M. Nasreddine,201319713720Rubio, W.M., P.H. de Godoy and E.C.N. Silva,20062469476Zhang, Y., R. Kamalian, A.M. Agogino and C.H. Sequin,20052005