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Articles by M Hamabe (1)
Automated characterization of bending and expansion of a lattice of a Si substrate near a SiGe/Si interface by using split HOLZ line patterns
K Saitoh
,
Y Yasuda
,
M Hamabe
and
N. Tanaka
Journal of Electron Microscopy 59 ( 5 ): 367 - 378 , 2010
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