Characterization of Boron Carbonitride (BCN) Thin Films Deposited by Radiofrequency and Microwave Plasma Enhanced Chemical Vapor Deposition

M.A. Mannan, M. Nagano, K. Shigezumi, T. Kida, N. Hirao and Y. Baba

American Journal of Applied Sciences 5 ( 6 ): 736 - 741 , 2008