Texture and microstructure of Cr₂O₃ and (Cr,Al)₂O₃ thin films deposited by reactive inductively coupled plasma magnetron sputtering

K. Pedersen, J. Bottiger, M. Sridharan, M. Sillassen and P. Eklund

Thin Solid Films 518 ( 15 ): 4294 - 4298 , 2010