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Articles by M. Krishna Kumar
Total Records ( 1 ) for M. Krishna Kumar
  M. Krishna Kumar , P. Deepak Raj , Albert Serra Torrent , K. Jeyadheepan and M. Sridharan
  Zinc oxide (ZnO) films were deposited onto glass substrates using reactive direct current magnetron sputtering technique by varying the substrate bias voltage (floating potential and -50 V) and retaining other parameters, viz., deposition time, substrate temperature, argon and oxygen flow, etc., as constant. The deposited ZnO films were doped with aluminium (Al) using thermal evaporation technique and subsequently annealed at 150°C for 2 h in ambient air. Pure and Al doped films were then investigated by X-ray diffraction (XRD), UV-Visible spectroscopy, Field-Emission Scanning Electron Microscopy (FE-SEM) and four probe method for their structural, optical, morphological and electrical properties, respectively. The films were polycrystalline in nature with hexagonal wurtzite structure. Increase in the grain size value was observed for the films deposited at -50 V substrate bias voltage as well as for the films doped with Al which in turn reduced the band gap value of the films. The band gap values of the films varied between 3.34 and 3.00 eV with respect to substrate bias voltage and Al doping. The variations in the properties of the films were correlated to the change in the micro-structural parameters due to the change in the ion energy variation influenced by the variation of substrate bias voltages.
 
 
 
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