Asian Science
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Abstract: Surface tension driven self-assembly has been demonstrated
to be a promising method for mass production of highly 3-D MEMS structures.
However, factors and their mechanisms affecting the self-assembly precision
of the hingeless structures are still barely understood. This study addresses
and analyzes some of the factors, including the inherent instability of the
hingeless structures, scale effect and the deformations of the limiter structure
which limits the self-assembly precision of hingeless structures. An energy
based model, verified by the experimental results, was introduced to evaluate
the adverse effect of each factor on the precision. This precision study can
serve as an optimum guideline for the designs of self-assembly MEMS microstructures
and allow the creation of high precise MEMS applications.