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Journal of Applied Sciences
Year: 2012  |  Volume: 12  |  Issue: 16  |  Page No.: 1630 - 1635

Preparation and Characterization of Highly Conducting and Optically Transparent Fluorine Doped CdO Thin Films

Aishwarya Viswanath, N. Nirmmala Devi, B.G. Jeyaprakash and R. Chandiramouli    

Abstract: A highly transparent and conducting metal oxide (TCO) film is a compromise between low resistivity and high transmittance. In the present study, fluorine doped cadmium oxide thin films (F:CdO) as TCO film were prepared with low sheet resistance (4 Ω cm-2) and high optical transmittance (85%). F:CdO films were deposited using spray pyrolysis method with precursor concentration of 0.1 M Cadmium acetate doped with 0.002, 0.004 and 0.006 M concentration of ammonium fluoride. Substrate temperature was fixed at 250°C with precursor solution flow rate of 3 mL min-1. The structural, morphological, optical and electrical characterization of F:CdO were investigated using X-ray Diffraction (XRD), Scanning Electron Microscopy (SEM), UV-visible spectrometer and four probe method, respectively. The structural studies confirms the polycrystalline nature of film with preferential orientation along (111) plane. Morphological studies show the presence of closely packed spherical grains. The band gap obtained by optical studies was found to vary between 2.5-2.8 eV for increasing fluorine concentration. The transparence of the film is found to be high in the range of 85%. Variation of electrical and optical parameters as a function of fluorine concentration were analyzed and reported.

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