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Asian Journal of Applied Sciences
Year: 2014  |  Volume: 7  |  Issue: 8  |  Page No.: 671 - 684

Preparation and Characterization of CuO Thin Films Prepared by Spray Pyrolysis Technique for Ethanol Gas Sensing Application

C. Ravi Dhas, Dinu Alexander, A. Jennifer Christy, K. Jeyadheepan, A. Moses Ezhil Raj and C. Sanjeevi Raja    

Abstract: The biomedical, chemical, drug and food industries have great demand of an alcohol sensor with high sensitivity and selectivity which can operate at low temperature. In this study, CuO thin films were deposited on well cleaned glass substrates by spray pyrolysis technique for 0.1, 0.2 and 0.3 molar concentrations of copper chloride precursor solutions and at a substrate temperature of 300°C and at an air pressure of 0.4 kg cm-2. X-ray diffraction patterns of the prepared films revealed the formation of CuO thin films having monoclinic structure with a grain size ranging from 35 to 54 nm. The microstrain and dislocation densities are found to decrease with increase in molar concentration. The surface morphology and the elemental composition of the deposited samples were analyzed using SEM and EDAX. The change in resistivity of the films was studied with respect to the change in temperature using two probe method. From Laser Raman spectral studies, the characteristic Raman peaks of the prepared samples were observed. The ethanol gas sensing properties of the prepared films were studied for 100 and 200 ppm ethanol vapour.

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