Abstract: The optical properties of LiNbO3 are very important material parameters and related with others such as applied voltage, strain and temperature. The important idea in integrated optics is the use of such waveguides as the basic structures of all the optical components, including lasers, modulators, detectors, prisms, lenses, polarisers and couplers. The knowledge of the refractive index profiles and the correlation between them and the fabrication parameters are prerequisites for designing efficient integrated electro-optic and non-linear optical devices. LiNbO3 crystals were implanted at room temperature with 1 and 1.5 MeV Cu ions at a flow of 5x1014 ions cm-2 and beam densities of 45 and 6nA cm-2 respectively. We have used the TRIM transport of ions in matter code to simulate the damage profile in LiNbO3 by Cu ions implantation with indicated dose and energies. This is helpful for choosing the functionality of planar optical waveguides. In this study, the correlation between the profiles of Cu distribution and refractive index is discussed; moreover we reported a doping of LiNbO3 with Cu atoms by MeV ion implantation and the subsequent fabrication of planar optical waveguide. Comparing the optical properties of samples implanted with 1 and 1.5 MeV would give more concrete insights into what happens in the implanted layer and from these points of view we examined differences in the optical properties of these samples.