Subscribe Now Subscribe Today
Science Alert
 
Blue
   
Curve Top
Journal of Applied Sciences
  Year: 2013 | Volume: 13 | Issue: 14 | Page No.: 2807-2812
DOI: 10.3923/jas.2013.2807.2812
 
Facebook Twitter Digg Reddit Linkedin StumbleUpon E-mail

Precision Study for Surface Tension Driven Self-assembly of Hingeless Structures

Lei Yang, Chunqing Wang and Wei Liu

Abstract:
Surface tension driven self-assembly has been demonstrated to be a promising method for mass production of highly 3-D MEMS structures. However, factors and their mechanisms affecting the self-assembly precision of the hingeless structures are still barely understood. This study addresses and analyzes some of the factors, including the inherent instability of the hingeless structures, scale effect and the deformations of the limiter structure which limits the self-assembly precision of hingeless structures. An energy based model, verified by the experimental results, was introduced to evaluate the adverse effect of each factor on the precision. This precision study can serve as an optimum guideline for the designs of self-assembly MEMS microstructures and allow the creation of high precise MEMS applications.
PDF References Citation Report Citation
How to cite this article:

Lei Yang, Chunqing Wang and Wei Liu, 2013. Precision Study for Surface Tension Driven Self-assembly of Hingeless Structures. Journal of Applied Sciences, 13: 2807-2812.

DOI: 10.3923/jas.2013.2807.2812

URL: https://scialert.net/abstract/?doi=jas.2013.2807.2812

COMMENT ON THIS PAPER
 
 
 

 

 
 
 
 
 
 
 
 
 

 
 
 
 
 
 
 

Curve Bottom