Research Article
Wafer Pre-Aligner System Based on Vision Information Processing
School of Mechanical Engineering, Dalian University of Technology, Dalian, China
Xiangji Kong
School of Mechanical Engineering, Dalian University of Technology, Dalian, China
Yu Du
School of Mechanical Engineering, Dalian University of Technology, Dalian, China
Jing Liu
School of Mechanical Engineering, Dalian University of Technology, Dalian, China