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Zhipeng Wu and Xinglin Chen, 2012. Synchronization Control for Reticle Stage and Wafer Stage Based on Iterative Learning Control. Information Technology Journal, 11: 492-495.
DOI: 10.3923/itj.2012.492.495
URL: https://scialert.net/abstract/?doi=itj.2012.492.495
DOI: 10.3923/itj.2012.492.495
URL: https://scialert.net/abstract/?doi=itj.2012.492.495