Asian Science Citation Index is committed to provide an authoritative, trusted and significant information by the
coverage of the most important and influential journals
to meet the needs of the global scientific community.
We present in this study a 3D numerical modelling of a microwave discharge (2.45GHz) excited by a surface wave in a large and small diameter cylindrical plasma cavity. Our first studies have been focused on the influence of the vertical situation of a short circuit in order to optimize the power coupling in the discharge. We used the CST microwave studio commercial code which solves Maxwell equations using the Finite Integration Technique (FIT).