Cerium oxide is a multi-application material due to its wide band gap (3.6 eV) and lattice parameter matching similar to silicon. Its high dielectric constant, ionic conductivity and ferromagnetic nature makes to utilize as insulating layer in transistors, solid oxide fuel cells and spintronic application, respectively. In the present study, thin films of cerium oxide and Mn doped cerium oxide films have been prepared on glass substrates by homemade spray pyrolysis unit. X-ray diffraction pattern analysis shows peak broadening upon doping and indicates a decrease in grain size. The influence of Mn doping on electrical properties was also analyzed and reported.